- 43 -
1
1
.
.
7
7
.
.
C
C
o
o
n
n
t
t
r
r
o
o
l
l
s
s
3.2.3. Plasma process time
3.2.3.1 Plasma process time with LF-Generator without heating
At this point the entry for the duration of plasma process in hours, minutes and seconds will
be made.
The set power and its maximum absolute deviation will be entered. If this value will be
exceeded an error message and an entry in the
Alarm list
appears. Also the process will be
cancelled.
The monitorings for actual pressure, actual gas flows and actual powers start after a
parameterizable time. If this time is passed the monitoring begins.
The error active time min means, the time which the respectively value has to be out of
ranges before an alarm will be generated.
Summary of Contents for femto
Page 23: ...23...