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1
1
.
.
5
5
C
C
a
a
r
r
r
r
i
i
e
e
r
r
SELECTION
TRAYS
1.5.1
TYPE
A
1.5.2
TYPE
B
1.5.3
TYPE
C
1.5.4
TYPE
D
1.5.5
TYPE
E
1.5.6
TYPE
F
1.5.7
TYPE
G
1.5.8
TYPE
H
Description
flat tray
flat tray
flat tray
flat tray
flat tray
flat tray
quartz glass
boat
quartz
glass boat
Material: Tray
aluminium
stainless
steel
borosilicate
glass
quartz glass
aluminium
stainless
steel
quartz glass
quartz
glass
Dimensions
W 90 mm
D 255 mm
H 3 mm
W 90 mm
D 255 mm
H 3 mm
W 83 mm
D 265 mm
H 5 mm
W 83 mm
D 265 mm
H 5 mm
W 100 mm
D 270 mm
H 3 mm
W 100 mm
D 270 mm
H 3 mm
2 “
L 200 mm
for 15 pcs.
Wafer
3 “
L 200 mm
for 15 pcs.
Wafer
Qty. of possible
trays
on request
on request
1 piece
1 piece
on request
on request
1 piece
1 piece
Application areas
standard
plasma
processes
standard
plasma
processes
pure plasma
processes
standard
plasma
processes
standard
plasma
processes
standard
plasma
processes
ultra pure
plasma
processes,
Wafer
treatment
ultra pure
plasma
processes,
Wafer
treatment
Figure
5.9 Device for powder treatment
•
Powder is treated in a rotating glass bottle
•
To fill the bottle, it can be removed from the mounting support
•
Please note, that the bottle can only be filled to a third of the volume, according
to the size to the grain size / product fineness we advise an even smaller
amount, because fine powders have bigger surfaces.
•
A suction filter is necessary at operating with abrasive chemicals
•
More information can be found in chapter 10 Plasma Processes
•
Only available with glass chambers
Summary of Contents for femto
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