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1
1
.
.
2
2
G
G
a
a
s
s
S
S
u
u
p
p
p
p
l
l
y
y
There are two variations of MFC’s (Mass Flow
Controller)
Variation 1
: manual control,
which has to be controlled like
the needle valve
And
Variation 2
: PC – controlled MFC. Detailed
Information according the handling of PC – controlled
MFC’s you will find in chapter 1.7 Controls, section PC-
Control.
Control MFC
Summary of Contents for femto
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