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Directory Plasma Process:
10.1
Parameters…………………………………………………………………………………
10.2
Materials….…………………………………………………………………….…………..
10.3
Spread of plasma………………………………….…………………….………………..
10.4
Pressure of gas bottle…..………………………………………………………………
10.5
Selection of gases…………………………………………………………………………
10.5.1
Purity of gases……………………………………………………………………………
10.5.2
Selection of pressure regulator………………………….………………………………
10.6 Gas
piping…………………………………………………………………………………
10.7
Gas bottle safety guidelines……..………………………………………………………
10.8 Gas
consumption………………………………………………………………………….
10.9
Gas correction factor (GKF)……………………………………………………………
10.10
Process parameters in general………………………………………….……………….
10.10.1 Cleaning……………………………………………………………………………………
10.10.1.1 Cleaning of metals…………………………………………………………..
10.10.1.2 Cleaning of plastics………………………………………………………...
10.10.1.3 Cleaning of glasses and ceramics…………………………………………
10.10.2
Activation………………………………………………………………………………….
10.10.2.1
Activation
of
metals…………..……………………………………………
10.10.2.2
Activation
of
plastics…………………………………………………………
10.10.2.3
Activation
of
glasses and ceramics…..……………………………………
10.10.2.4
Activation
of
powders.………………………………………………………
10.10.3
Etching……………………………………………………………………………………
10.10.3.1 Etching of metals…………………………………………………………
10.10.3.2 Etching of plastics….………………………………………………………
10.10.3.3 Etching of glasses and ceramics…………………………………………
10.10.4 Coating by means of plasma polymerization…………………………………………
10.10.4.1 Coating of metals…… ……………………………………………………...
10.10.4.2 Coating of plastics…………..……………………………………………….
10.10.4.3 Coating of glasses and ceramics……….…………………………………
10.10.4.4 Coating of textiles……..……………………………………………………
Summary of Contents for femto
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