Amtech Axpert-Eazy AMT-011-4, Instruction Manual

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Amtech
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6
No. Parameter Unit Def Min Max Res Description WP
GROUP-5: RETURN STEP FOR TABLE-1
G501 Return Step T1-
STP1
1 1 14 1 Set return step for Table-1, Step-1.
G502 Return Step T1-
STP2
1 1 14 1 Set return step for Table-1, Step-2.
G503 Return Step T1-
STP3
1 1 14 1 Set return step for Table-1, Step-3.
G504 Return Step T1-
STP4
1 1 14 1 Set return step for Table-1, Step-4.
G505 Return Step T1-
STP5
1 1 14 1 Set return step for Table-1, Step-5.
G506 Return Step T1-
STP6
1 1 14 1 Set return step for Table-1, Step-6.
G507 Return Step T1-
STP7
1 1 14 1 Set return step for Table-1, Step-7.
G508 Return Step T1-
STP8
1 1 14 1 Set return step for Table-1, Step-8.
G509 Return Step T1-
STP9
1 1 14 1 Set return step for Table-1, Step-9.
G510 Return Step T1-
STP10
1 1 14 1 Set return step for Table-1, Step-10.
G511 Return Step T1-
STP11
1 1 14 1 Set return step for Table-1, Step-11.
G512 Return Step T1-
STP12
1 1 14 1 Set return step for Table-1, Step-12.
G513 Return Step T1-
STP13
1 1 14 1 Set return step for Table-1, Step-13.
G514 Return Step T1-
STP14
1 1 14 1 Set return step for Table-1, Step-14.
G515 Return Step T1-
STP15
1 1 14 1 Set return step for Table-1, Step-15.
GROUP-6: RETURN STEP FOR TABLE-2
G601 Return Step T2-
STP1
1 1 14 1 Set return step for Table-2, Step-1.
G602 Return Step T2-
STP2
1 1 14 1 Set return step for Table-2, Step-2.
G603 Return Step T2-
STP3
1 1 14 1 Set return step for Table-2, Step-3.
G604 Return Step T2-
STP4
1 1 14 1 Set return step for Table-2, Step-4.
G605 Return Step T2-
STP5
1 1 14 1 Set return step for Table-2, Step-5.
G606 Return Step T2-
STP6
1 1 14 1 Set return step for Table-2, Step-6.
G607 Return Step T2-
STP7
1 1 14 1 Set return step for Table-2, Step-7.