LSM 710 and LSM 780
TOOLS, ADDITIONAL SOFTWARE
Systems
Maintenance Tool
Carl Zeiss
02/2010 M60-1-0025
e
63
6.4
Maintenance Tool
With a calibration objective and correct system configuration, the maintenance tool allows convenient
self adjustment of the LSM 710 and LSM 780 systems. The optical beampath, relative pinhole position
and scanner adjustment can be set and checked automatically on the LSM 710 and LSM 780 systems.
6.4.1
Calibration objective
Observe the following notes:
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The calibration objective is not suitable for NLO, there is a risk of bubble formation in the substrate.
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Using the HAL, the IR protection filter must be used, and the intensity of the HAL should only briefly
be set to more than 70 %.
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With strong heat there is a risk of deformation of the substrate in the calibration objective.
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The lateral screws need to be tightened carefully without applying too much force.
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The calibration objective needs to be entered in the system database as "APO Calibration LSM" with
SAP no. 420639-9000-700. It needs to be entered at ZEN \ Maintain \ Objectives.
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Calibration objectives with other samples than shown in Fig. 46 shall not be used. The cap with the
calibration sample can be obtained separately under SAP-No. 420639-9900-700.
Fig. 46
Calibration objective