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10 Technical Data and Conformity | 10.2 Installation Requirements
ZEISS
Parameter
Requirement
Vibrations
Less than 6 μm/sec rms from 0–30 Hz
Less than 12 μm/sec rms above 30 Hz
Magnetic stray
fields
Max. 3 × 10⁻⁷ T (peak to peak) = 3 mG (peak to peak)
Acoustic noise
Less than 53 dB for frequencies up to 200 Hz
Less than 42 dB for frequencies from 200 up to 300 Hz
Less than 50 dB for frequencies higher than 300 Hz
10.2.1 Layout and Connections
A
B
C
D
E
F
G
H
I
1
2
3
4
1
Static vibration damper
A
Mains power supply
208...230 V/25 A, L1/N(L2)/PE
2
Pre-vacuum pump
Equipotential bonding bar
3
Computer workplace
Pressure reducer (water, nitrogen,
compressed air)
4
Emergency Off (EMO) button (optional)
Main shut-off valves
Water supply
Water runback
Nitrogen supply
Compressed air supply
Exhaust line
124
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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