Zeiss Crossbeam 550, Инструкция по эксплуатации

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8 Troubleshooting | 8.1 Overview ZEISS
Keyword Symptom Cause Remedy
SE image SE image is noisy. Scintillator is used up. Contact your local ZEISS
service representative to
have the scintillator re-
placed.
Specimen current Specimen current is low. Field emission gun is used
up. Contact your local ZEISS
service representative to
have the field emission gun
replaced.
Working distance is too
short. Enlarge working distance
to about 5 mm or more.
Specimen stage Stage does not move. Stage needs to be initial-
ized. Refer to Initializing the
Stage [
}
99] .
Stage does not move ac-
curately. Stage needs to be initial-
ized. Refer to Initializing the
Stage [
}
99] .
Stored position of the
specimen stage cannot be
approached correctly. Absolute stage movement
is required. Stage needs to
be driven to a well-defined
position. Refer to Initializing the
Stage [
}
99] .
Stage/Joystick Under TV control, the di-
rection of dual joystick
movement and direction
of stage movement seem
to be different. TV joystick angle does not
fit for the selected CCD
camera. Refer to Changing the Joy-
stick TV Angle [
}
100] .
Stage cannot be moved
by using the joystick. Joystick Disable checkbox
is activated. Deactivate the checkbox in
the Stage tab of the Cross-
beam SEM Control panel.
Temperature, water
flow Error message Stage
Board too hot (or simi-
lar) is displayed.
Flow of cooling water is
not OK. Refer to Checking the Wa-
ter Flow and Temperature
[
}
102] .
Touch alarm Touch alarm message is
displayed. Specimen or specimen
holder has touched objec-
tive or wall of the speci-
men chamber. Refer to Resetting the
Touch Alarm [
}
101] .
Vacuum Vac ready = OK is not dis-
played after specimen ex-
change. System vacuum is bad due
to a vacuum leak at the
chamber door. Check the chamber door
seal for cleanliness.
If required, refer to Replac-
ing the Chamber Door Seal
[
}
101] .
Vac ready = OK is dis-
played very late after
specimen exchange. Gas ballast at rotary pump
or scroll pump is activated. Deactivate gas ballast at
the pre-vacuum pump.
Microscope does not
vent. No nitrogen. Check nitrogen supply.
No compressed air. Check compressed air sup-
ply.
Vac ready = OK is dis-
played abnormally fast. Penning gauge has not
been identified correctly. Restart the microscope.
98 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000