Table of Contents
ZEISS
4.1.2 Graphical Control Elements .......................................................................... 56
4.1.3 User Access Levels and User Privileges .......................................................... 57
4.1.4 SmartSEM Program Suite.............................................................................. 59
4.2.1 SmartFIB User Interface ................................................................................ 61
4.2.2 Graphical Control Elements .......................................................................... 62
4.2.3 SmartFIB Program Suite................................................................................ 63
6.1.1 Energizing the Microscope ........................................................................... 65
6.1.2 Starting the Microscope ............................................................................... 66
6.1.3 Starting SmartSEM ....................................................................................... 66
6.2.1 Preparing the Specimen Holder .................................................................... 69
6.2.2 Loading the Specimen Chamber ................................................................... 70
6.2.3 Locating the Specimen ................................................................................. 72
6.2.4 Switching on the Gun................................................................................... 73
6.2.5 Switching on the EHT ................................................................................... 74
6.2.6 Acquiring an Image ...................................................................................... 74
6.2.7 Optimizing the Image................................................................................... 76
6.2.8 Saving the Image.......................................................................................... 78
6.3.1 Selecting the Gun Mode............................................................................... 79
6.3.2 Setting the Probe Current............................................................................. 80
6.3.3 Measuring the Probe Current ....................................................................... 80
6.3.4 Changing the Extractor Voltage.................................................................... 81
6.4 Working with Different Aperture Configurations and Beam Modes ......................... 81
6.4.1 Determining the Installed Aperture Configuration | Gemini II Column ........... 81
6.4.2 Selecting the Column Mode ......................................................................... 82
6.5.1 Selecting a Detector ..................................................................................... 82
6.5.2 Setting up the InLens SE Detector................................................................. 83
6.5.3 Setting up the SE Detector ........................................................................... 83
6.5.4 Setting up the EsB Detector.......................................................................... 84
6.5.5 Setting up the SESI Detector......................................................................... 85
6.5.6 Setting up the aBSD/BSD Detector................................................................ 86
6.5.7 Setting up the aSTEM/STEM Detector ........................................................... 88
6.5.8 Setting up the CL Detector ........................................................................... 91
6.6.1 Finishing the Work Session ........................................................................... 91
6.6.2 De-energizing the Microscope ...................................................................... 92
6.6.3 Performing a Lockout/Tagout ....................................................................... 93
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Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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