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6 Operation | 6.6 Shutting down the System
ZEISS
5. Exit the SmartSEM user interface. Refer to
Exiting the SmartSEM User Interface [
6. Close all programs and software.
7. Select Windows start button > Power icon > Shut down.
8. At the front of the plinth, press the
Standby
button.
à
The microscope switches to Standby mode.
6.6.1.1 Exiting the SmartSEM User Interface
1. From the Menu Bar, select File > Exit.
à
A system message is displayed.
2. Click Yes.
3. Close the EM Server.
à
A system message is displayed.
4. Click Yes.
6.6.2 De-energizing the Microscope
Prerequisite
ü
The microscope is in Standby mode, see
1. To switch to Off mode, press the
Off
button at the front of the plinth.
à
The yellow
Standby
button blinks during shut down.
à
When all subsystems are fully deactivated, the
Off
button lights up red permanently.
à
Computer, electronic components, and vacuum system are switched off.
à
The electron optical column is partially vented.
à
A 24 V auxiliary voltage is still present to restart the microscope.
2. To cut off the compressed air supply, close the compressed air main shut-off valve.
3. To cut off the nitrogen supply, close the nitrogen main shut-off valve.
4. To cut off the cooling water supply, close the main shut-off valve for water.
5. Set the
MAIN
switch to the Off position.
à
All power is cut off from the microscope.
6. To disconnect the power connection at the facility installation, remove the power plug
(male connector) from the socket (female connector).
7. To secure the microscope against accidental re-activation, refer to
See also
2
2
92
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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