Zeiss Crossbeam 550, Инструкция по эксплуатации

Страница: 5 / 136

ZEISS ​ Table of Contents​
8 Troubleshooting.................................................................................................... 96
8.1 Overview ................................................................................................................. 96
8.2 Overall System ......................................................................................................... 99
8.2.1 Checking the CAN Communication .............................................................. 99
8.3 Chamber.................................................................................................................. 99
8.3.1 Initializing the Stage ..................................................................................... 99
8.3.2 Defining the Post Initialization Position of the Stage ..................................... 100
8.3.3 Changing the Joystick TV Angle.................................................................... 100
8.3.4 Replacing the Chamber Door Seal ................................................................ 101
8.3.5 Resetting the Touch Alarm ........................................................................... 101
8.3.6 Checking the Water Flow and Temperature.................................................. 102
8.4 Column.................................................................................................................... 102
8.4.1 Baking out the Gun Head ............................................................................. 102
8.4.2 Calibrating the Probe Current ....................................................................... 103
8.5 Power Circuit ........................................................................................................... 104
8.5.1 Checking the Position of the Circuit Breakers................................................ 104
8.6 Detectors................................................................................................................. 105
8.6.1 Lubricating the Rod ...................................................................................... 105
8.7 Focused Ion Beam ................................................................................................... 106
8.7.1 Checking the Lifetime of the Ion Source ....................................................... 106
8.7.2 Regenerating the Ion Source by Heating....................................................... 106
8.7.3 Manually Finding a New Extractor Value ...................................................... 107
9 Shutdown and Disposal........................................................................................108
9.1 Putting the Microscope out of Operation................................................................. 108
9.2 Transport and Storage ............................................................................................. 108
9.3 Disposal ................................................................................................................... 110
9.3.1 Disposing of Solid Waste (Consumables) ...................................................... 110
9.3.2 Disposing of the Microscope ........................................................................ 110
10 Technical Data and Conformity ............................................................................111
10.1 Product Specification ............................................................................................... 111
10.2 Installation Requirements......................................................................................... 114
10.2.1 Layout and Connections............................................................................... 124
10.2.2 System Layout .............................................................................................. 127
10.3 Declaration of Conformity........................................................................................ 129
11 Parts and Tools .....................................................................................................130
11.1 Consumables ........................................................................................................... 130
11.2 Spare Parts .............................................................................................................. 130
11.3 Tools and Accessories .............................................................................................. 130
Index .....................................................................................................................132
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 5