Zeiss Crossbeam 550, Инструкция по эксплуатации

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8 Troubleshooting | 8.7 Focused Ion Beam ZEISS
8.7 Focused Ion Beam
8.7.1 Checking the Lifetime of the Ion Source
Purpose The ion source is a consumable that is used up during operation.
In order to keep track of the ion supply, the ion source lifetime needs to be checked regularly.
Info
When the lifetime of the ion source approaches 3000 μAh, contact the ZEISS service represen-
tative to have the ion source replaced.
1. In the FIB Toolbar , from the FIB drop-down list, select FIB .
à
The FIB tab of the FIB Control Panel is displayed.
à
The lifetime of the ion source is indicated as μAh.
2. Check the lifetime of the ion source.
8.7.2 Regenerating the Ion Source by Heating
Purpose From time to time, the gallium emitter has to be regenerated by heating.
The heating procedure is used in following cases:
§
If the suppressor voltage has reached its limits (i.e. 0 V or 2 kV) while a probe current of 2 μA
cannot be maintained anymore
§
If the ion source does not start emitting
§
If the source is switched into Standby mode because the emission current exceeds the thresh-
old defined in the SmartSEM Administrator in the Go to Standby if emission exceeds input
field.
Info
Source heating can also be performed via Source Management. Source Management includes
automatically triggered procedures to ensure an optimum performance of the ion source.
These procedures are configured in the SmartSEM Administrator via FIB > FIB Source Manage-
ment.
Safety Information
NOTICE
Risk of property damage: Ion source
Danger of damaging the ion source due to overheating. Excessive filament heating may reduce
source life.
4
Only heat as often as necessary.
Prerequisite
ü
Requires the Supervisor privilege.
1. In the Panel Configuration Bar, double-click FIB Ga Source Heating.
à
The FIB Ga Source Heating window is displayed.
2. Click Multi-Heat.
à
An automatic heating routine is performed.
3. If the ion source still does not start emitting, find a new extractor value.
Refer to Manually Finding a New Extractor Value [
}
107] .
106 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000