ZEISS
8 Troubleshooting | 8.2 Overall System
Keyword
Symptom
Cause
Remedy
If this does not solve the
problem, contact your local
ZEISS service representa-
tive.
Gun vacuum is worse
than 8 to 9 × 10⁻⁹ mbar.
The pumping capacity of
the ion getter pump de-
creases in the course of
time, thus deteriorating
the gun vacuum.
Optional Components
Keyword
Symptom
Cause
Remedy
Flood Gun
No communication can be
established with Smart-
SEM
Loose cable connection.
Check the cable connec-
tion. If this does not help,
contact the ZEISS service
representative.
Flood Gun controller has
an old firmware version.
Flood Gun is not activated
in FIB Configurator.
8.2 Overall System
8.2.1 Checking the CAN Communication
Purpose
Checking the CAN Communication is useful if the microscope does not react to your commands
anymore.
1. In the Panel Configuration Bar, double-click CAN Communication.
à
The CAN Communication window is displayed.
2. If any of the values is indicated as Yes, make sure that all cable connections between work-
station and PC are plugged in correctly.
3. If this does not help, reset the workstation as described in the instruction manual of the mi-
croscope.
INFO: If the problem persists, contact your ZEISS service representative.
8.3 Chamber
8.3.1 Initializing the Stage
Purpose
If a stored stage position cannot be approached or if the stage does not move or does not move
accurately, the stage needs to be initialized.
Prerequisite
ü
The specimen chamber has been evacuated, see
Loading the Specimen Chamber [
ü
Requires the Stage Initialise privilege
ü
If there are any large specimens inside the chamber, remove them before initializing
1. From the Menu Bar, select Stage > Stage Initialise.
à
The
Initialise Stage
window is displayed.
2. Confirm via Yes.
à
The stage initialization process takes a few minutes.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
99
Содержание Crossbeam 550
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