Zeiss Crossbeam 550, Инструкция по эксплуатации

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8 Troubleshooting | 8.4 Column ZEISS
8.3.6 Checking the Water Flow and Temperature
1. In the Panel Configuration Bar, double-click Water Flow/Temperature.
à
The Water Flow/Temperature panel is displayed.
2. Check the entries.
à
If a value is critical, it is displayed in red.
8.4 Column
8.4.1 Baking out the Gun Head
Purpose The pumping capacity of the ion getter pump decreases in the course of time, thus deteriorating
the gun vacuum. This can be remedied by an ion getter pump bakeout as a regular maintenance
procedure.
Overview The procedure contains the following steps:
§ Switching off the Gun [
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Starting the Bakeout [
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§ Switching on the Gun [
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8.4.1.1 Switching off the Gun
Safety Information
NOTICE
Risk of property damage: Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
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When using the Standby mode, activate the Partial Vent on Standby function.
1. In the right part of the Status Bar, click or .
à
The pop-up menu for Vacuum, Gun and EHT activation is displayed.
2. Click Shutdown Gun.
3. Wait until the gun has ramped down.
à
This may take up to 5 minutes.
102 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000