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10 Technical Data and Conformity | 10.2 Installation Requirements
ZEISS
A
B
C
D
E
F
G
H
I
1
2
3
4
1
Static vibration damper
A
Mains power supply
120 V, 50–60 Hz, 16 A, 1/N/PE or
230 V, 50–60 Hz, 16 A, 1/N/PE
2
Pre-vacuum pump
Equipotential bonding bar /
grounding screw terminal (Ø 8 mm)
3
Pre-vacuum pump 2 (optional)
Pressure reducer (nitrogen)
4
Computer workplace
Main shut-off valve
5
Emergency Off (EMO) box (optional)
Nitrogen supply
6
Emergency Off (EMO) button (optional)
Exhaust line (optional)
126
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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