8 Troubleshooting | 8.1 Overview
ZEISS
8 Troubleshooting
8.1 Overview
The following table provides hints for solving common problems. If you cannot solve the problem
or if you are unsure about a certain technical difficulty, contact your local ZEISS service represen-
tative.
Keyword
Symptom
Cause
Remedy
Drift
Specimen seems to be
moving.
§
Charging effects.
§
Nonconductive speci-
men.
§
Ensure proper conduc-
tion of the specimen.
§
Optimize specimen
preparation.
§
Apply a charge com-
pensation method.
Stub not correctly fixed by
screw.
Fix the stub correctly.
EHT cannot be switched
on.
CAN communication has
failed.
Refer to
.
The workstation has
crashed.
CAN communication has
failed.
Refer to
.
Emission is unstable.
Ion source needs to be re-
generated.
Refer to
.
Ion source may be used up
( > 3000 μAh).
Contact the ZEISS service
representative to have the
ion source replaced.
No emission.
Ion source needs to be re-
generated.
Refer to
.
Ion source may be used
up.
Contact the ZEISS service
representative to have the
ion source replaced.
No image.
Aperture position is not
correct.
Initialize the FIB aperture in
the
FIB
tab of the
FIB Con-
trol
panel.
Align the aperture in the
Align
tab of the
FIB Con-
trol
panel.
Column conditions have
deteriorated, charging ef-
fects occur.
Start a purging process in
the
Options
tab of the
FIB
Control
panel.
Gun valve is closed.
Open the gun valve in the
FIB
tab of the
FIB Control
panel.
Emission current is too
high (e.g. 4 or 5 μA) for
more than 30 min.
Ion source needs to be re-
generated.
Refer to
.
96
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
Страница 135: ......