![background image](http://html1.mh-extra.com/html/zeiss/crossbeam-550/crossbeam-550_instruction-manual_927680028.webp)
3 Product and Functional Description | 3.1 System Overview
ZEISS
1
Multichannel Gas Injection System (GIS)
for up to 5 precursor materials on a sin-
gle flange
Refer to instruction manual Multi GIS
2
Annular STEM detector (aSTEM) for
transmission imaging and quality con-
trol. Two different models are available
(aSTEM4, aSTEM1). Detection of up to
4 channels in parallel is possible.
Refer to
3
Local charge compensator for SEM
imaging and analysis of non-conductive
specimens
Refer to instruction manual Charge
Compensator
4
Electron flood gun for ion beam prepa-
ration of non-conductive specimens
Refer to instruction manual Flood Gun
5
Single needle GIS for high angle speci-
men access
Refer to instruction manual UniGIS
6
Micro-manipulator for specimen modifi-
cation and probing
7
BSD detector for high efficiency BSE de-
tection and angle selective material
characterization. Four different models
are available (aBSD4, aBSD1, BSD4,
BSD1). Detection of up to 4 channels in
parallel is possible.
8
EsB detector for finest z resolution with-
out topographic artifacts and unique
material contrast
Refer to
9
Airlock with optional navigation camera
(80 mm or 200 mm wide) for fast and
efficient specimen transfer and fast
pumping times
Refer to the respective instruction man-
ual 80 mm Airlock or 200 mm Airlock
Further options:
§
Control panel
Refer to
§
Plasma Cleaner
Refer to instruction manual Plasma Cleaner
§
Energy-dispersive X-ray spectrometer (EDS) for chemical analysis
§
EBSD for crystallographic mapping
§
SESI detector for Secondary Electron and Secondary Ion imaging
Refer to
§
CL detector for the analysis of cathodoluminscent materials
Refer to
§
Nanopatterning and Visualization Engine (NPVE) for advanced patterning and lithography
tasks
Information will be provided by the manufacturer
§
Electrostatic Beam Blanker for SEM
Refer to instruction manual Beam Blanker
§
Rapid Laser Ablation Upgrade
Refer to instruction manual Rapid Laser Ablation Upgrade
§
Further options on request
28
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
Страница 135: ......