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4 Software Description | 4.1 SmartSEM
ZEISS
Checkbox
Privilege
FIB Probe Alignment
Enables the user to adjust the probe currents.
Gun Align
Enables the user to modify the alignment of the electron beam.
Gun Off
Enables the user to switch off the field emission filament.
Mill Defaults
Enables the user to modify the default settings for FIB milling.
Stage Initialise
Enables the user to initialize the motorized stage.
Supervisor
Enables the user to perform the following actions:
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Start the Administrator, create and edit users
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Modify the filament current
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Set up, edit, and delete global stage coordinates
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Save common macros and toolbars
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Save common recipes
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Activate Partial Vent on Standby, Z Move on vent, Protect Z, Go
to HV@Shutdown, EHT Off & Log Off and Leave Gun ON at Shut-
down.
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Use the bakeout function
§
Start the FIB filament heating.
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Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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