Zeiss Crossbeam 550, Инструкция по эксплуатации

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2 Safety | 2.4 Safety Equipment ZEISS
S2 (Start) Button
The green S2 (Start) button is attached below the MAIN switch at the rear side of the plinth.
The S2 (Start) button is required to confirm the setting of the MAIN switch. It cuts off all devices
connected to the EMO box from the main power supply.
The S2 (Start) button must be pushed in the following cases:
§
After the MAIN switch has been set to the ON position, or
§ After the EMO button has been released.
Fig. 4: S2 (Start) button below the MAIN switch
2.4.4 Locking Devices
The microscope is equipped with several locking devices.
2.4.4.1 Chamber Door Locking Device
The chamber door locking device ensures that the door of the specimen chamber is closed prop-
erly.
It is located at the inner bottom front side of the specimen chamber.
When this locking device is activated (i.e. no electrical contact)
EHT Vac ready = no
is indi-
cated in the SmartSEM user interface. EHT and SE detector voltages are blocked.
2.4.4.2 Vacuum Locking Device
The vacuum locking device ensures that gun vacuum and system vacuum are better than the re-
quired thresholds.
2.4.4.3 Interlock System of Optional Airlock
The interlock function ensures that the gate valve can only be operated if the chamber door and
the airlock door are properly closed.
Fig. 5: Airlock Error LED
Additional blocking functions ensure that the specimen can only be transferred if the following
conditions are fulfilled:
§
The airlock rod is retracted.
§
The specimen stage is in transfer position.
§
The EHT (Extra high tension) is off.
§
The column chamber valve is closed.
This is to prevent any risk of damaging the airlock rod or the gate valve.
20 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000