Zeiss Crossbeam 550, Инструкция по эксплуатации

Страница: 82 / 136

6 Operation | 6.5 Finding Appropriate Detector Settings ZEISS
Info
If you wish to change the installed configuration of your microscope, contact your local ZEISS
service representative.
1. From the Menu Bar, select View > SEM Status.
à
The SmartSEM Status dialog is displayed.
2. In the Select tab, click Anode Aperture Diameter.
3. Select the Display tab.
à
The parameter Aperture Size is displayed.
6.4.2 Selecting the Column Mode
Purpose With the Gemini column, different column modes are available.
The Normal mode is the standard imaging and analytical mode with a high flexibility for different
applications. Overview mode provides a large field of view.
1. In the Crossbeam SEM Control panel, select the Control tab.
2. In the Column section, select between:
Normal and Overview
3. If required, adjust the Depth of Field slider.
6.5 Finding Appropriate Detector Settings
6.5.1 Selecting a Detector
You need to select an appropriate detector depending on the application and the pressure mode.
In addition to the standard SE detector, several optional detectors are available.
For information on special set-up procedures for the detectors, see:
§
Setting up the InLens SE Detector [
}
83]
§ Setting up the SE Detector [
}
83]
§
Setting up the SESI Detector [
}
85]
§
Setting up the aBSD/BSD Detector [
}
86]
§
Setting up the EsB Detector [
}
84]
§
Setting up the aSTEM/STEM Detector [
}
88]
§ Setting up the CL Detector [
}
91]
1. Select the Imaging tab of the Crossbeam SEM Control panel.
2. Select the detector from the Signal A drop-
down list.
82 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000