Zeiss Crossbeam 550, Инструкция по эксплуатации

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ZEISS 6 Operation | 6.5 Finding Appropriate Detector Settings
6.5.5 Setting up the SESI Detector
Purpose The SESI detector is optionally available and replaces the chamber SE detector.
The SESI detector enables you to acquire both secondary electron images and FIB secondary ion
images.
Fig. 33: Intergranular corrosion in an nickel based superalloy
The following settings are recommended for the SESI detector:
§ Settings when working in SE mode, secondary electron imaging, FIB mode = SEM:
EHT Typical WD Collector Voltage
100 V – 30 kV 2–12 mm
Typically 5 mm
§ Adjustable from 0 V to +1500 V
§
Best detection: +300 V to +400 V
§
Settings when working in SE mode, secondary electron imaging, FIB mode = FIB:
EHT Typical WD Collector Voltage
2 kV – 30 kV Coincidence point
§
Adjustable from 0 V to +1500 V
§
Best detection: +300 V to +400 V
§
Settings when working in ion mode, secondary ions imaging, FIB mode = FIB:
EHT Typical WD Collector Voltage
2 kV – 30 kV Coincidence point
§
Adjustable from −4 kV to +0 kV
§
Best detection: Around −4 kV
1. In the FIB Toolbar, from the Imaging Mode drop-down list, select an imaging mode, e.g.
FIB mode = SEM.
2. In the Crossbeam SEM Control panel, select the Imaging tab.
3. From the Signal A drop-down list, select SESI.
à
By default, secondary electrons are detected.
4. In order to detect secondary ions, in the Imaging tab, activate the SESI Mode checkbox.
5. Adjust the EHT, working distance (WD), and collector voltage according to the suggestions
in the table in order to optimize the image.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 85