![background image](http://html1.mh-extra.com/html/zeiss/crossbeam-550/crossbeam-550_instruction-manual_927680097.webp)
ZEISS
8 Troubleshooting | 8.1 Overview
Keyword
Symptom
Cause
Remedy
Automatic regulation of
the emission current is de-
activated.
Activate the
Regulate
checkbox in the
FIB
tab of
the
FIB Control
panel.
Extractor target is not set
to an appropriate value.
Change the extractor tar-
get. Refer to
Finding a New Extractor
Value [
.
Open the
Gun Monitor
and record the parameters
FIB Suppressor Target
and
FIB Emission I
and
send it to your ZEISS service
representative.
Suppressor voltage is ap-
proaching 0 V or 2 kV.
Ion source needs to be re-
generated.
Misalignment of struc-
tures when milling with
different FIB probe cur-
rents.
Beam shift for the probe
currents is not adjusted.
Adjust the beam shift cor-
rection for the relevant FIB
probe currents.
Image quality
Image quality gets worse,
but there is no change in
total emission current.
Field emission gun has
been damaged due to arc-
ing.
Contact your local ZEISS
service representative to
have the field emission gun
replaced.
Image is noisy and noise
reduction methods do not
help.
Field emission gun is used
up.
Contact your local ZEISS
service representative to
have the field emission gun
replaced.
Image is bad at low EHT
(e.g. 1 kV)
Working distance is too
long.
Reduce the working dis-
tance to a maximum of
7 mm.
InLens image
InLens image is noisy.
Working distance is too
long.
Reduce the working dis-
tance.
No InLens image can be
obtained.
EHT exceeds 20 kV.
Reduce EHT to a maximum
of 20 kV.
Microscope
Microscope is dead.
Circuit breaker is tripped
(lower position).
Stored position of the
specimen stage cannot be
approached correctly.
PC has crashed.
Stage needs to be driven
to a well-defined position.
SEM Gun
Gun is switched off auto-
matically.
Gun has been switched off
automatically for safety
reasons since gun vacuum
is worse than
2 × 10⁻⁸ mbar
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
97
Содержание Crossbeam 550
Страница 135: ......