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3 Product and Functional Description | 3.3 Optional Components and Accessories
ZEISS
3.3 Optional Components and Accessories
3.3.1 Optional Detectors
3.3.1.1 SESI Detector
Purpose
The Secondary Electrons Secondary Ions (SESI) detector is suitable to detect secondary electrons
as well as secondary ions. In Crossbeam systems, the optional SESI detector replaces the SE detec-
tor.
1
2
4
5
3
Fig. 18: Schematics of the
detector
1
2
Objective lens
3
4
Collector grid
5
Specimen
Operating
Principle
Depending on the polarity of the collector voltage, either electrons or ions scattered from the
specimen
5
are attracted by a collector grid
4
and accelerated to the converter. In the
converter, both electrons and ions are converted into secondary electrons which are used to gen-
erate an image.
Detector Mode
FIB Mode
Detected Signals
Typical Application
typical collector v300 V
Secondary electrons
Topography
Ion mode
typical collector voltage −4 kV
Secondary ions
Crystal orientation contrast, ma-
terial contrast e.g. imaging of
corrosion/oxidation caused by FIB
processes in metals
44
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Содержание Crossbeam 550
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