SRS Labs QMS 100 Series, Руководство пользователя

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SRS QMS Gas Analyzer
References
General RGA information
Dawson, “Quadrupole Mass Spectrometery and Its Applications”, AIP Press, NY, 1995.
Drinkwine and D. Lichtman, “Partial Pressure Analyzers and Analysis”, AVS Monograph Series
published by the Education Committee of the American Vacuum Society
Basford et. al., J. Vac. Sci. Technol., A 11(3) (1993) A22-40: “Recommended Practice for the
Calibration of Mass Spectrometers for Partial Pressure Analysis. Update to AVS Standard 2.3”.
Batey, Vacuum , 37 (1987) 659-668: “Quadrupole Gas Analyzers”
Fu Ming Mao et. al., Vacuum , 37 (1987) 669-675: “The quadrupole mass spectrometer in practical
operation”
Dawson, Mass Spectrometry Reviews , 5 (1986) 1-37: “Quadrupole mass analyzers: Performance,
design, and some recent applications”
Vacuum Diagnosis
Studt, R&D Magazine , October 1991, p. 104: “Design Away Those Tough Vacuum System Riddles”
Applications of RGAs to process control
O’Hanlon, J. Vac. Sci. Technol. A 12 (4), Jul/Aug 1994: “Ultrahigh vacuum in the semiconductor
industry”
Vic Comello, R&D Magazine , September 1993, p. 65: “Process Monitoring with “Smart” RGAs”
Waits, et. al., Semiconductor International , May 1994, p. 79: “ Controlling your Vacumm Process:
Effective Use of a QMA”
Rosenberg, Semiconductor International , October 1995, p. 149: “The Advantages of Continuous
On-line RGA Monitoring”.
Lakeman, Semiconductor International . October 1995, p. 127: “Increase overall Equipment
Effectiveness with In Situ Mass Spectrometery”.
Quantitative measurements
Bley, Vacuum , 38 (1988) 103-109: “Quantitative measurements with quadrupole mass spectrometers:
important specifications for reliable measurements”
Cowen, et. al., J. Vac. Sci. Technol. A 12(1), Jan/Feb 1994: “ Nonlinearities in sensitivity of
quadrupole partial pressure analyzers operating at higher pressures”
Multiple linear regression analysis algorithms
William H. Press, et. al., 1992, Numerical Recipes in C, The Art of Scientific Computing, Second
Edition , Cambridge Univ. Press, section 15.4, page 671.
Bevington, P.R., 1969, Data Reduction and Error Analysis for the Physical Science s, New York,
McGraw-Hill, Chapters 8-9.