SRS Labs QMS 100 Series, Руководство пользователя

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SRS QMS Gas Analyzer
Chapter 2. Windows Software
The QMS system contains a mass spectrometer that belongs to a class of spectrometers
commonly referred to as
residual gas analyzers or RGA . RGAs are low resolution, low mass
range, quadrupole spectrometers. The SRS spectrometer is used both as a stand-alone RGA and
in the PPR and QMS systems. The same software package is used to operate all three
instruments. The description in this chapter refers to the spectrometer as
RGA .
More information about the RGA program can be found in the On-Line Help files provided on
the program CD. The RGA help system includes current and detailed description of all the
features, procedures, and commands available in the program.
In This Chapter
Overview ........................................................................................................................................................ 2-3
Program Structure..................................................................................................................................... 2-3
RGA Files ................................................................................................................................................. 2-3
RGA files (.rga) .................................................................................................................................. 2-3
RGA Scan log files (.ana .hst .tbl) ...................................................................................................... 2-3
RGA ASCII Data files (.txt) ............................................................................................................... 2-4
RGA Graph Metafiles (.wmf) ............................................................................................................. 2-4
System Requirements ..................................................................................................................................... 2-4
Getting Started................................................................................................................................................ 2-4
Starting the RGA Software....................................................................................................................... 2-5
Connecting to a Head ............................................................................................................................... 2-5
Shutting Down the RGA System.............................................................................................................. 2-5
Features and Operation................................................................................................................................... 2-6
The RGA Window.................................................................................................................................... 2-6
Multiple Head Operation .......................................................................................................................... 2-6
Display Modes.......................................................................................................................................... 2-6
Analog (Mode Menu) ......................................................................................................................... 2-7
Histogram (Mode Menu) .................................................................................................................... 2-7
Table (Mode Menu) ............................................................................................................................ 2-7
P vs. T (Mode Menu).......................................................................................................................... 2-8
Leak Test (Mode Menu) ..................................................................................................................... 2-9
Annunciator (Mode Menu) ................................................................................................................. 2-9
Library (Mode Menu) ....................................................................................................................... 2-10
Data Acquisition ..................................................................................................................................... 2-10
Scan Data Logging ................................................................................................................................. 2-11
Graph Management ................................................................................................................................ 2-11
Head Management .................................................................................................................................. 2-12
Sensitivity Factors .................................................................................................................................. 2-12
Spectrum Analysis .................................................................................................................................. 2-12
Background Data .................................................................................................................................... 2-13
RGA Head and Scan Parameters.................................................................................................................. 2-13
Changing Scanning Parameters .............................................................................................................. 2-13
Changing Head Parameters..................................................................................................................... 2-14
Changing Scan Trigger Rates ................................................................................................................. 2-14
Scanning With The Filament Off ........................................................................................................... 2-15
Display Modes.............................................................................................................................................. 2-15
Changing Display Modes ....................................................................................................................... 2-16