SRS Labs QMS 100 Series, Руководство пользователя

Страница: 55 / 280

SRS QMS Gas Analyzer User’s Manual
Chapter 3.
Measurement Techniques
This chapter discusses procedures to help the user make accurate measurements with the QMS.
Several sections are devoted calibration and tuning procedures. The last sections discuss specific
measurement techniques.
In This Chapter
Calibration ..........................................................................................................................................................................3-2
Effect of Total Pressure .............................................................................................................................................3-3
Operating Off the Design Pressure....................................................................................................................3-3
Total Pressure and Composition........................................................................................................................3-4
Calibration of Partial Pressure...................................................................................................................................3-5
Initial Calibration ..................................................................................................................................................3-6
Basic Recalibration...............................................................................................................................................3-7
Calibration for Multiple Operating Conditions................................................................................................3-8
Calibration with Fixed Reservoir ........................................................................................................................3-8
Peak Tuning Procedure..............................................................................................................................................3-8
General Procedure ..............................................................................................................................................3-10
Peak Position Tuning Algorithms ....................................................................................................................3-11
Peak Width Tuning Algorithms .......................................................................................................................3-12
Temperature Effects on the Mass Scale Calibration.....................................................................................3-14
Electron Multiplier Tuning Procedure ...................................................................................................................3-15
Techniques .......................................................................................................................................................................3-16
Correcting for the Chamber Background ..............................................................................................................3-16
Correcting for Multiple Species..............................................................................................................................3-17
Operation with Condensable Gases.......................................................................................................................3-17