Basic Knowledge for Operation
157
ZG User’s Manual
5
APPENDICES
Three CCD Modes and Their Characteristics
The ZG series is provided with three CCD modes, “high-resolution mode,” “standard
mode” and “high-speed mode.”
Hint When Setting the CCD Mode
The resolution in the width direction is common
The number of pixels in the X-axis is the same in all three modes. Accordingly, the
resolution in the width direction does not change even if a different mode is selected.
When measuring edge position or width, select the CCD mode based on the response
time as the resolution will not change whichever mode is selected.
The measurement center distance does not change even if the mode is changed.
High-resolution mode: min. 16 ms
400 pixels
100 pixels
50 pixels
Standard mode: min. 8 ms
High-speed mode: min. 5 ms
631 pixels
631 pixels
631 pixels
By quadrupling the number of
pixels in the height direction
By halving the number of
pixels in the height direction
High-resolution measurement of the
shape of measurement targets
Shape measurement in fast line
speed processes
N
ot
e
Measurement range in high-speed mode
Measurement range in standard/high-resolution mode
Measurement center
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