MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Model Code Appendix B: Model Code Explanation
62
Full Scale Range - sccm of Nitrogen (XXX)
The full scale range is indicated by a two digit / one letter code.
Ordering Code
10 11C
20 21C
50 51C
100 12C
200 22C
500 52C
1,000 13C
2,000 23C
5,000 53C
10,000 14C
20,000 24C
Fittings (Y)
Three types of fittings are available, designated by a single letter code.
Ordering Code
Swagelok 4-VCR Male R
Swagelok 4-VCO Male G
Swagelok ¼” tube S
Length adapter with VCR fittings L
Length adapter with Swagelok fittings W
Valve (Z)
Two valve configurations are available, designated by a single number code.
Ordering Code
Normally Closed (Type 1179 MFC only) 1
No Valve (Type 179 MFM only) 3