MKS Mass-Flo 1179A, Инструкция по эксплуатации

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List of Figures and Tables
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List of Figures and Tables
Figures
Figure 1: Outline Dimensions of the Type 1179 MFC and Type 179 MFM ........................... 27
Figure 2: Side View of the Type 1179 MFC and Type 179 MFM.......................................... 28
Figure 3: Outline Dimensions of the Type 2179 MFC (with optional mounting plate) ........... 28
Figure 4: Mounting Dimensions of the 1179 Flow Controller................................................ 29
Figure 5: Mounting Dimensions of the Base Aluminum Plate ............................................... 30
Figure 6: Mounting Dimensions of the Type 2179 Flow Controller ....................................... 30
Figure 7: Serial Number Label .............................................................................................. 38
Figure 8: Location of the Retaining Screws ........................................................................... 51
Figure 9: Location of the Lock Nut and Centershaft .............................................................. 52
Figure 10: Location of the R85 Potentiometer on the PC Board............................................. 55
Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve ........................................... 76
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole.........................................................6
Tableau 3: Définition des symboles apparaissant sur l'unité ......................................................10
Tabla 4: Definición de los símbolos hallados en la unidad ........................................................14
Table 5: MKS Cables ...............................................................................................................24
Table 6: 9-Pin Type “D” Connector Pinout...............................................................................32
Table 7: 20-Pin Edge Card Connector Pinout ...........................................................................33
Table 8: 15-Pin Type “D” Connector Pinout.............................................................................34
Table 9: Troubleshooting Chart ................................................................................................49
Table 10: Maximum Valve Currents.........................................................................................54
Table 11: Valve Current Headroom ..........................................................................................54
Table 12: Cv Pressure Factors ..................................................................................................71
Table 13: Valve Configuration Selection Guide........................................................................72
Table 14: Suitable Two-Way Solenoid Valves..........................................................................75