MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Appendix A: Product Specifications Performance Specifications
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Appendix A: Product Specifications
Performance Specifications
Accuracy
1
± 1% F.S.
CE Compliance
2, 3
EMC Directive 89/336/EEC
Control Range (MFC only) 2.0 to 100% F.S.
Controller Settling Time
4
(MFC only)
<2 seconds (to within 2% of set point)
Full Scale Ranges (nitrogen equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000,
10,000, 20,000, 30,000 sccm
Maximum Inlet Pressure 150 psig
Operational Differential Pressure
5
≤
5000 sccm
10,000 to 30,000 sccm
10 to 40 psid
15 to 40 psid
Pressure Coefficient 0.02% Rdg./psi
Repeatability (MFC only) ± 0.2% F.S.
Resolution (measurement) 0.1% F.S.
Temperature Coefficients
Zero
Span
< 0.05% F.S./° C (500 ppm)
<0.08% of Rdg/° C (800 ppm)
Warm up Time (to within 0.2% of steady-state) 2 minutes
1
Includes non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0° C.
2
An overall metal braided, shielded cable, properly grounded at both ends, is required during use.
3
Units with Edge Card connectors are not CE compliant.
4
Controller settling time per SEMI E17-91, specified for flows starting from 0 to 10% (or greater) F.S.
5
Operational differential pressure is referenced to an MFC outlet pressure at atmosphere.