MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Chapter One: General Information How This Manual is Organized
19
How This Manual is Organized
This manual is designed to provide instructions on how to set up and install a Type 1179 Series
unit.
Before installing your Type 1179 Series unit in a system and/or operating it, carefully read
and familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all
WARNING
and
CAUTION
notes provided throughout the manual.
Chapter One: General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two: Installation, explains environmental requirements and practical considerations to
take into account when selecting the proper setting for the mass flow controller.
Chapter Three: Overview, describes, in a general way, how the flow controller operates in a gas
flow system. This chapter also provides information on how to use a Gas Correction Factor
when interpreting the output signal for a gas other than the calibration gas.
Chapter Four: Operation, explains how to start up and operate the mass flow controller. It also
discusses how to override the control valve.
Chapter Five: Theory of Operation, provides additional information on how the flow controller
operates.
Chapter Six: Maintenance, lists a few general practices to follow to ensure that the flow
controller will perform optimally.
Chapter Seven: Troubleshooting, includes a table of hints for reference in the event that your
flow controller malfunctions.
Appendix A: Product Specifications, lists the specifications of the instrument.
Appendix B: Model Code Explanation, describes the instrument’s ordering code.
Appendix C: Gas Correction Factors, provides a table listing the gas correction factors for the
most commonly used gases.
Appendix D: MFC Sizing Guidelines, is provided for reference and describes how to calculate
the correct size MFC for an application. This information is useful if you need to purchase
another MFC or if you plan to use your MFC in another, different application.
Appendix E: Positive Shutoff Valve Information, describes how to attach a solenoid valve to a
Type 2179 MFC.