MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Chapter Three: Overview Type 2179 MFC with a Positive Shutoff Valve
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Chapter Three: Overview
Type 2179 MFC with a Positive Shutoff Valve
The Type 2179 consists of a Type 1179 flow controller configured with a positive shutoff valve
downstream. A pneumatically operated valve may be used in series with a mass flow controller
when a no-leakage condition is required. The shutoff valve is an all 316L VAR SST diaphragm
valve with a Kel-F
®
valve seat. It has a maximum leak rate across the ports of 4 x 10
-9
sccm He
and a leak rate of less than 1x10
-9
sccm He, to the outside.
Refer to Figure 3, page 28, for the dimensions of a Type 2179 flow controller.
Electrical Connections
If you are using the 1179 instrument with any equipment other than corresponding MKS power
supply/readout units, consult the manufacturer’s specifications for connection, and for proper
electrical and power characteristics. Refer to Appendix A: Product Specifications, page 57, for
electrical requirements of the Type 1179 flow controller.
The 1179 flow controller is available with either a Type “D” or an Edge Card connector.