WARRANTY
Type 1179A/2179A/179A Equipment
MKS Instruments, Inc. (MKS) warrants that for three years from the date of shipment the
equipment described above (the “equipment”) manufactured by MKS shall be free from
defects in materials and workmanship and will correctly perform all date-related
operations, including without limitation accepting data entry, sequencing, sorting,
comparing, and reporting, regardless of the date the operation is performed or the date
involved in the operation, provided that, if the equipment exchanges data or is otherwise
used with equipment, software, or other products of others, such products of others
themselves correctly perform all date-related operations and store and transmit dates and
date-related data in a format compatible with MKS equipment. THIS WARRANTY IS
MKS’ SOLE WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending three
years later, MKS will, at its option, either repair or replace any part which is defective in
materials or workmanship or with respect to the date-related operations warranty without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of
the purchaser for any breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements with
respect to the responsibility for shipping the equipment and handling any other incidental
charges with the MKS sales representative or distributor from which the equipment was
purchased or, in the case of a direct purchase from MKS, with the MKS home office in
Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in
accordance with the specifications recommended by MKS for the proper and normal use
of the equipment. MKS shall not be liable under any circumstances for indirect, special,
consequential, or incidental damages in connection with, or arising out of, the sale,
performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is returned
to MKS for this periodic re-calibration it is considered normal preventative maintenance
not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY
PATENT.
11-98
116527-P1
Содержание Mass-Flo 1179A
Страница 3: ...116527 P1 Rev E 3 99 MKS Type 1179A and 2179A Mass Flo Controller and Type 179A Mass Flo Meter...
Страница 8: ...Table of Contents vi...
Страница 10: ...List of Figures and Tables viii...
Страница 54: ...How To Use the Optional Input MFC only Chapter Four Operation 44 This page intentionally left blank...
Страница 66: ...How To Adjust the Valve Preload MFC only Chapter Seven Troubleshooting 56 This page intentionally left blank...
Страница 70: ...Physical Specifications Appendix A Product Specifications 60 This page intentionally left blank...
Страница 74: ...Model Code Appendix B Model Code Explanation 64 This page intentionally left blank...
Страница 84: ...How To Determine the Valve Configuration Appendix D MFC Sizing Guidelines 74 This page intentionally left blank...