MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Electrical Connections Chapter Three: Overview
34
15-Pin Type “D” Connector
Table 8 lists the pinout of the 15-pin Type “D” connector for a mass flow controller.
15-Pin Type “D” Connector Pinout
Pin Assignment Pin Assignment
1 MKS Test Point* 9 No Connection
2 Flow Signal Output
(0 to +5 VDC)
10 Optional Input*
3 Valve Close*
(TTL low)
11 Signal Common
4 Valve Open*
(TTL low)
12 Signal Common
5 Power Supply Common 13 No Connection
6 -15 VDC 14 No Connection
7 +15 VDC 15 Chassis Ground
8 Set Point Input*
(0 to +5 VDC)
* For an MFC only, No Connection for an MFM
Table 8: 15-Pin Type “D” Connector Pinout
Note
1. The “No Connection” pin assignment refers to a pin with no internal
connection.
2. The 0 to 5 VDC flow signal output comes from pin 2 and is
referenced to pin 12 (signal common).
3. Any appropriate 0 to 5 VDC input signal of less than 20K ohm
source impedance referenced to pin 12 can be used to supply a set
point signal to pin 8.