MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Appendix D: MFC Sizing Guidelines General Information
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Appendix D: MFC Sizing Guidelines
General Information
To select the correct MFC for an application, you must determine the:
•
flow controller range
•
appropriate valve configuration
The flow controller range depends on the desired flow rate and the gas correction factor for the
gas to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow
rate for other gases may vary.
The proper valve configuration depends upon the flow range, inlet pressure, differential pressure
across the unit, and density of the gas. Proper valve configurations have been established for all
standard flow ranges flowing nitrogen under standard operating pressures. These configurations
are suitable for virtually all gases and pressure conditions.