MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Appendix A: Product Specifications Physical Specifications
59
Physical Specifications
Body (height x width x length) without
≤
fittings
<5.5 in x
≤
1.5 in x 3 in
<14.0 cm x
≤
3.8 cm x 7.6 cm
Fittings Swagelok
®
4-VCR
®
male compatible
Swagelok 4-VCO
®
(male) compatible,
¼” Swagelok compatible
Internal Surface Area (500 sccm unit) 7.7 in 2 (49.7 cm 2 )
Internal Volume (500 sccm unit) 0.27 in 3 (4.43 cm 3 )
Leak Integrity
External (scc/sec He)
Through closed valve (MFC only)
< 1 x 10
-9
< 1.0% F.S. @40 psi
Materials Wetted
Body and Valve Seat
Seals
316L SST, nickel, Elgelloy
Viton
®
, Buna-N, Kalrez
®
Neoprene, all-metal
Weight
≤ ≤
1.9 lbs (0.86 kg)
Due to continuing research and development activities, these product specifications are subject to change without notice.