MKS Mass-Flo 1179A, Инструкция по эксплуатации

Страница: 49 / 88

Chapter Four: Operation How To Start Up the MFC/MFM
39
Chapter Four: Operation
How To Start Up the MFC/MFM
1. Leak test the fittings on the MFC/MFM using standard leak test procedures.
Do not proceed to the next step until you are certain that there is no gas leakage.
2. Plug the power supply/readout cable (MKS or customer-supplied) into the connector
(either a 9-pin Type “D”, 15-pin Type “D” or a PC Edge Card connector) located at the
top of the flow controller.
Plug the other end of the cable into an MKS or MKS-compatible power supply/readout
unit.
3. Apply power to the MFC/MFM instrument.
When power is first applied, the output signal jumps to + 7.5 VDC.
You can monitor the flow output signal as the heaters stabilize and the output approaches
zero. Approximately 2 minutes after power up, the output signal should be within
10 mV (0.2% F.S.) of the final voltage at all specified flow rates.
Warning
If the instrument is being used to control dangerous gases,
be sure that the system is
fully warmed up before applying
gases to the system. You may choose to install a positive
shutoff valve to prevent inadvertent gas flow during the
warm-up period.
Once the MFC/MFM is completely warmed up, you can proceed to zero the unit as
required.