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Copyright © 1999 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.

Printed in the United States of America

Mass-Flo

®

is a registered trademark of MKS Instruments, Inc., Andover, MA

Swagelok

®

, VCR

®

, and VCO

®

are registered trademarks of Swagelok Marketing Company,

Solon, OH

Kalrez

®

and Viton

®

are registered trademarks of DuPont Dow Elastomers Inc., Wilmington,

DE

NUPRO

®

is a registered trademark of Crawford Fitting Company, Solon, OH

Kel-F

®

is a registered trademark of 3M, Minneapolis, MN

DeviceNet



is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL

Protected by U.S. Patent 5,461,913; foreign patents pending

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Содержание Mass-Flo 1179A

Страница 1: ...uction Manual MKS Type 1179A and 2179A Mass Flo Controller and Type 179A Mass Flo Meter Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web...

Страница 2: ...h by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect...

Страница 3: ...116527 P1 Rev E 3 99 MKS Type 1179A and 2179A Mass Flo Controller and Type 179A Mass Flo Meter...

Страница 4: ...the United States of America Mass Flo is a registered trademark of MKS Instruments Inc Andover MA Swagelok VCR and VCO are registered trademarks of Swagelok Marketing Company Solon OH Kalrez and Vito...

Страница 5: ...d bit de masse 9 Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad del controlador de flujo de masa 13 S m...

Страница 6: ...Type D Connector 34 The Gas Correction Factor GCF 35 How To Calculate the GCF for Pure Gases 35 How To Calculate the GCF for Gas Mixtures 36 How To Read Mass Flow at a Different Reference Temperature...

Страница 7: ...cations 57 Environmental Specifications 58 Electrical Specifications 58 Physical Specifications 59 Appendix B Model Code Explanation 61 Model Code 61 Appendix C Gas Correction Factors 65 Common Gases...

Страница 8: ...Table of Contents vi...

Страница 9: ...ock Nut and Centershaft 52 Figure 10 Location of the R85 Potentiometer on the PC Board 55 Figure 11 Connecting the Type 2179 MFC to a Solenoid Valve 76 Tables Table 1 Definition of Symbols Found on th...

Страница 10: ...List of Figures and Tables viii...

Страница 11: ...o a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attentio...

Страница 12: ...earth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IE...

Страница 13: ...adjustments Any service must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used observe the proper safety precautions compl...

Страница 14: ...ting from a pressurized gas source install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contam...

Страница 15: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger...

Страница 16: ...anschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ng...

Страница 17: ...rch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal Vorsicht...

Страница 18: ...ersteigen Geeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosion...

Страница 19: ...condition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger po...

Страница 20: ...e masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant conti...

Страница 21: ...ternes Tout d pannage doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s prendre les mesures de pr...

Страница 22: ...ource de gaz pressuris installer un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIO...

Страница 23: ...personales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posi...

Страница 24: ...a tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente c...

Страница 25: ...SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o r...

Страница 26: ...periores a la m xima presi n nominal en las especificaciones del instrumento hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente...

Страница 27: ...supply and readout though it cannot send a set point to the flow controller Refer to the corresponding manuals for requirements and instructions The 1179 Series flow units are available in a variety...

Страница 28: ...tests and with an overall metal braided shielded cable properly grounded at both ends CE Compliance EMC Directive 89 336 EEC units with a Type D connector only the Edge Card connector is not CE compl...

Страница 29: ...preting the output signal for a gas other than the calibration gas Chapter Four Operation explains how to start up and operate the mass flow controller It also discusses how to override the control va...

Страница 30: ...the use of your Type 1179 instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument...

Страница 31: ...umber from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Opening the Package The 1179 Series unit...

Страница 32: ...ssories Kit M100B K1 includes a mate to the electrical connector if you choose to make your own interface cable Interface cables refer to Interface Cables page 24 Power supply readout such as the Type...

Страница 33: ...5000 sccm units 15 to 40 psid for 10 000 to 30 000 sccm units The standard orifice is sized for control over this range with the outlet at atmospheric pressure 3 Provide power input at 15 VDC 5 200 mA...

Страница 34: ...89 336 EEC an overall metal braided shielded cable properly grounded at both ends is required during use No additional installation requirements are necessary to ensure compliance with Directives 92...

Страница 35: ...3 With very few exceptions the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one poi...

Страница 36: ...ow Controller page 40 2 Install the flow controller in the gas stream such that the flow will be in the direction of the arrow on the side of the controller 3 Allow adequate clearance for the cable co...

Страница 37: ...6 2 Swagelok 4 VCR compatible 4 88 123 9 shown Swagelok 4 VCO compatible 4 56 115 8 Swagelok compatible 4 44 112 7 Figure 1 Outline Dimensions of the Type 1179 MFC and Type 179 MFM Note The method use...

Страница 38: ...Figure 2 Side View of the Type 1179 MFC and Type 179 MFM 0 625 15 8 0 125 3 1 3 38 85 9 5 43 137 9 with Type D connector 5 30 134 6 with PC Edge Board Connector or Figure 3 Outline Dimensions of the...

Страница 39: ...ittings For specific information regarding these fittings refer to the manufacturer s documentation Optional Fittings As an option inch Swagelok compatible or Swagelok 4 VCO male compatible fittings a...

Страница 40: ...8 NPT National Pipe Thread internal fitting The aluminum plate can be mounted via four mounting holes Refer to Figure 5 for the location of the mounting holes on the aluminum plate 6 34 161 0 5 58 14...

Страница 41: ...at It has a maximum leak rate across the ports of 4 x 10 9 sccm He and a leak rate of less than 1x10 9 sccm He to the outside Refer to Figure 3 page 28 for the dimensions of a Type 2179 flow controlle...

Страница 42: ...t Point For an MFC only No Connection for an MFM Table 6 9 Pin Type D Connector Pinout Note 1 Chassis ground is not available on a separate pin Instead it is carried out through the cable shielding Be...

Страница 43: ...nnection J MKS Test Point 9 No Connection K No Connection 10 Signal Common L Valve Close TTL low For an MFC only No Connection for an MFM Table 7 20 Pin Edge Card Connector Pinout Note 1 The No Connec...

Страница 44: ...L low 12 Signal Common 5 Power Supply Common 13 No Connection 6 15 VDC 14 No Connection 7 15 VDC 15 Chassis Ground 8 Set Point Input 0 to 5 VDC For an MFC only No Connection for an MFM Table 8 15 Pin...

Страница 45: ...ons for calculating gas correction factors are listed in How To Calculate the GCF for Pure Gases page 35 and How To Calculate the GCF for Gas Mixtures page 36 Note 1 When using the GCF the accuracy of...

Страница 46: ...rogen Specific Heat of nitrogen a1 through an Fractional Flow of gases 1 through n Note a1 through an must add up to 1 0 s1 through sn Molecular Structure correction factor for gases 1 through n where...

Страница 47: ...000 0 75 1 782 0 1244 0 25 1 250 0 2485 0 3106 0 7725 0 25 0 1663 0 0777 0 3106 1 0225 0 244 0 3176 0 244 GCFM 1 302 How To Read Mass Flow at a Different Reference Temperature The equations for calcul...

Страница 48: ...R MKS Instruments Inc Made in the USA 1179A12CR1BV 1179A12CR1BV Serial Model 012345678 RANGE 100 SCCM GAS N2 Figure 7 Serial Number Label Control Valve MFC only The Control Valve is a specially constr...

Страница 49: ...tible power supply readout unit 3 Apply power to the MFC MFM instrument When power is first applied the output signal jumps to 7 5 VDC You can monitor the flow output signal as the heaters stabilize a...

Страница 50: ...ontroller Note A set point command signal greater than 50 mV 1 of full scale is required for the flow controller to generate an output For an MFM Skip to step 2 in Adjust the Zero Pot Adjust the Zero...

Страница 51: ...stream side of the controller To decrease flow signal oscillation Turn the controller gain counter clockwise to decrease the controller gain setting Note Lowering the supply pressure to the MFC will h...

Страница 52: ...signal to pin 1 To close the valve apply ground to pin 1 Note To control with a TTL signal use a tri stated device If the 1179 flow controller is equipped with an Edge Card connector To open the valve...

Страница 53: ...ed external device to the appropriate optional input position for the particular connector Refer to Table 8 page 34 and Table 7 page 33 for the pinout assignments Voltage to the optional input overrid...

Страница 54: ...How To Use the Optional Input MFC only Chapter Four Operation 44 This page intentionally left blank...

Страница 55: ...e of the following A sensor tube for ranges 10 sccm N2 equivalent A sensor tube and parallel bypass for ranges 10 sccm N2 equivalent The geometry of the sensor tube in conjunction with the specified f...

Страница 56: ...o 5 VDC set point signal compares it to its own flow signal and generates an error voltage This error signal is then conditioned by a PID Proportional Integral Derivative algorithm and amplified so th...

Страница 57: ...pment Return Authorization Number before returning the unit to MKS Instruments for service Zero Adjustment For best accuracy and repeatability you should check the zero setting periodically and reset...

Страница 58: ...s or problems using your flow controller Note If it is necessary to return the instrument to MKS for repair please contact any of the MKS international service calibration centers listed on the inside...

Страница 59: ...Flow Controller page 40 Controller does not function Electronics malfunctioning Valve sticking Return for service Readjust the valve following the instructions in How To Adjust the Valve Preload page...

Страница 60: ...ipment to adjust the valve Questions concerning the safe handling of toxic or hazardous gases may be answered by consulting your corporate policy a government agency such as OSHA or NIOSH or experts f...

Страница 61: ...gas while making any valve adjustments to safeguard against inadvertent exposure to any toxic or hazardous gas DO NOT adjust the valve while a hazardous or toxic gas is flowing through the MFC If you...

Страница 62: ...valves in the system both upstream and downstream of the MFC 7 Zero the unit following the instructions in How To Zero the Flow Controller page 40 8 Disconnect one electrical valve lead from its post...

Страница 63: ...lock nut Caution Do not overturn the centershaft Excessive turning may damage the plug and cause poor closed conductance and flow control 13 Holding the centershaft in place re tighten the jam nut As...

Страница 64: ...R85 is located in the top right hand corner of the board It is the only black potentiometer on the board and is much smaller than the others b Determine the required valve current limit by adding the...

Страница 65: ...Chapter Seven Troubleshooting How To Adjust the Valve Preload MFC only 55 Current Limiter R85 Potentiometer Figure 10 Location of the R85 Potentiometer on the PC Board...

Страница 66: ...How To Adjust the Valve Preload MFC only Chapter Seven Troubleshooting 56 This page intentionally left blank...

Страница 67: ...sccm 10 to 40 psid 15 to 40 psid Pressure Coefficient 0 02 Rdg psi Repeatability MFC only 0 2 F S Resolution measurement 0 1 F S Temperature Coefficients Zero Span 0 05 F S C 500 ppm 0 08 of Rdg C 80...

Страница 68: ...22 F Electrical Specifications Connector Options 9 pin Type D 15 pin Type D 20 pin Edge Card Digital RS 485 Digital DeviceNet Input Voltage Current Required Maximum at Start Up first 5 seconds 6 Typic...

Страница 69: ...elok compatible Internal Surface Area 500 sccm unit 7 7 in2 49 7 cm2 Internal Volume 500 sccm unit 0 27 in3 4 43 cm3 Leak Integrity External scc sec He Through closed valve MFC only 1 x 10 9 1 0 F S 4...

Страница 70: ...Physical Specifications Appendix A Product Specifications 60 This page intentionally left blank...

Страница 71: ...d instrument and options are identified in the model code when you order the unit All parts of the product code apply to both the mass flow controller and the mass flow meter The model code is identif...

Страница 72: ...C 5 000 53C 10 000 14C 20 000 24C Fittings Y Three types of fittings are available designated by a single letter code Ordering Code Swagelok 4 VCR Male R Swagelok 4 VCO Male G Swagelok tube S Length a...

Страница 73: ...ith Kel F plugs N Buna N with Kel F plugs B Kalrez with Kel F plugs K All metal Type 179 MFM only M How To Order a Mass Flow Controller To order the Type 1179 MFC with a 500 sccm full scale range Swag...

Страница 74: ...Model Code Appendix B Model Code Explanation 64 This page intentionally left blank...

Страница 75: ...Chlorine CO2 CO CCl4 CF4 Cl2 0 2016 0 2488 0 1655 0 1654 0 1144 1 964 1 250 6 86 3 926 3 163 0 701 1 00 0 31 0 42 0 86 Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoro...

Страница 76: ...lF3 0 1873 0 176 0 1357 0 1432 0 153 1 695 3 127 6 129 5 395 4 660 0 98 0 50 0 33 0 35 0 38 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 0 1113 0 1654 0 140 0 1544 0 1...

Страница 77: ...00 1 339 1 250 0 56 0 21 1 46 0 99 1 00 Nitrogen Dioxide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 0 1933 0 1797 0 2088 0 185 0 2193 2 052 3 168...

Страница 78: ...richloro 1 2 2 Trifluoroethane Freon 113 Tungsten Hexafluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 0 1592 0 1357 0 1380 0 161 0 0810 0 0378 6 516 6 129 6 043 8 360 13 28 5 858 0 26...

Страница 79: ...as correction factor for the gas to be used MKS states the flow controller ranges based on flow rate of nitrogen the flow rate for other gases may vary The proper valve configuration depends upon the...

Страница 80: ...e GCF for Ar is 1 41 2 Insert the GCF of Ar in the following formula GCF of N2 GCF of Ar x Desired flow rate of Ar where x is the equivalent flow rate of nitrogen sccm J a m N u t C e n t e r s h a f...

Страница 81: ...1 0 5 165 0 042 0 046 0 052 0 063 0 072 0 087 0 122 0 192 0 272 0 384 150 0 044 0 048 0 055 0 066 0 075 0 092 0 128 0 202 0 285 0 403 125 0 049 0 054 0 061 0 073 0 083 0 101 0 141 0 221 0 312 0 441 10...

Страница 82: ...flow rate for the unit Choose the valve configuration above your calculated Cv value to ensure that the unit can deliver the required flow Valve Configuration Selection Guide Valve Configuration Nomi...

Страница 83: ...71 The Gas Density for boron trichloride listed in Appendix C Gas Correction Factors page 65 is 5 227 The Cv Pressure Factor read from Table 12 page 71 for a 20 psia inlet and 5 psid differential pre...

Страница 84: ...How To Determine the Valve Configuration Appendix D MFC Sizing Guidelines 74 This page intentionally left blank...

Страница 85: ...ve to close NUPRO offers several 2 way solenoid valves which can serve this purpose When the solenoid is energized the air pressure is applied to the actuator of the positive shutoff valve so the valv...

Страница 86: ...alve Appendix E Positive Shutoff Valve Information 76 Figure 11 shows how to connect the 2179 MFC to the solenoid valve Power Supply Air Supply Vent Solenoid Valve Type 2179 MFC Figure 11 Connecting t...

Страница 87: ...Gas connections 29 Gas correction factors description of 35 gas mixtures 36 pure gases 35 reference temperature 35 I Interface cables 24 Interface connectors 24 Introduction 17 L Leak rate 31 Leak te...

Страница 88: ...Index 78 performance 57 58 59 T Troubleshooting 49 U Unpacking 21 checklist 22 opening 21 V Valve adjustment 50 override 42 Z Zero 40...

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