
Chapter Two: Installation
How To Unpack the Type 1179 Series Unit
21
Chapter Two: Installation
How To Unpack the Type 1179 Series Unit
MKS has carefully packed the 1179 Series unit so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note
Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Opening the Package
The 1179 Series unit is assembled, leak tested with helium, and calibrated in a clean room
environment. The instrument is double-bagged in this environment to ensure maintenance of its
particle free condition during shipment. It is very important to remove the bags according to
clean room practices. To maintain at least a minimal level of clean room standards, follow the
instructions below.
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2.
Wipe down the exterior of the inner bag with a clean room wipe.
This step reduces the contamination introduced into the clean room.
3. Remove the inner bag in the clean room.
Содержание Mass-Flo 1179A
Страница 3: ...116527 P1 Rev E 3 99 MKS Type 1179A and 2179A Mass Flo Controller and Type 179A Mass Flo Meter...
Страница 8: ...Table of Contents vi...
Страница 10: ...List of Figures and Tables viii...
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Страница 66: ...How To Adjust the Valve Preload MFC only Chapter Seven Troubleshooting 56 This page intentionally left blank...
Страница 70: ...Physical Specifications Appendix A Product Specifications 60 This page intentionally left blank...
Страница 74: ...Model Code Appendix B Model Code Explanation 64 This page intentionally left blank...
Страница 84: ...How To Determine the Valve Configuration Appendix D MFC Sizing Guidelines 74 This page intentionally left blank...