Symbols Found on the Unit
Mass Flow Controller Safety Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007
Off (Supply)
IEC 417, No.5008
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
Содержание Mass-Flo 1179A
Страница 3: ...116527 P1 Rev E 3 99 MKS Type 1179A and 2179A Mass Flo Controller and Type 179A Mass Flo Meter...
Страница 8: ...Table of Contents vi...
Страница 10: ...List of Figures and Tables viii...
Страница 54: ...How To Use the Optional Input MFC only Chapter Four Operation 44 This page intentionally left blank...
Страница 66: ...How To Adjust the Valve Preload MFC only Chapter Seven Troubleshooting 56 This page intentionally left blank...
Страница 70: ...Physical Specifications Appendix A Product Specifications 60 This page intentionally left blank...
Страница 74: ...Model Code Appendix B Model Code Explanation 64 This page intentionally left blank...
Страница 84: ...How To Determine the Valve Configuration Appendix D MFC Sizing Guidelines 74 This page intentionally left blank...