MKS Mass-Flo 1179A, Инструкция по эксплуатации

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Appendix E: Positive Shutoff Valve Information How To Operate the Positive Shutoff Valve
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Appendix E: Positive Shutoff Valve Information
How To Operate the Positive Shutoff Valve
The Type 2179 mass flow controller includes a NUPRO

positive shutoff valve. The positive
shutoff valve is a normally closed, air actuated valve, therefore, you must connect an air supply
to operate the valve. The air supply should be between 70 and 80 psig.
The valve opens when air is supplied to the valve; the air pressure must be released for the valve
to close. NUPRO offers several 2-way solenoid valves which can serve this purpose. When the
solenoid is energized, the air pressure is applied to the actuator of the positive shutoff valve, so
the valve opens. When the solenoid is de-energized, the air supply is disconnected from the
positive shutoff valve and the actuator is vented to atmosphere, so the valve closes.
Suitable NUPRO solenoid valves are listed in Table 14.
Suitable Two-Way Solenoid Valves
For BN Valves All Others Operating Voltage
MS-SOL-1K-BN MS-SOL-1K 24 VDC
MS-SOL-2K-BN MS-SOL-2K 110/120 VAC
MS-SOL-3K-BN MS-SOL-3K 24 VAC
MS-SOL-4K-BN MS-SOL-4K 12 VDC
MS-SOL-5K-BN MS-SOL-5K 220/240 VAC
MS-SOL-6K-BN MS-SOL-6K 5 VDC
Table 14: Suitable Two-Way Solenoid Valves