C O N F I D E N T I A L – FEI Limited Rights Data
7-1
7
System Options
This chapter covers hardware and software that is an option either integrated in, or accessory to the Scios 2 system
(not all of them are described here).
C a u t i o n !
Only optional accessories meeting the manufacturer's specifications shall be used.
•
Support PC –
connects your work space to the network and can hold some other software utilities.
•
Manual User Interface (MUI)
– provides direct manual control of microscope parameters such as focus,
magnification, contrast, brightness, beam shift and correcting astigmatism.
•
Joystick
– brings another possibility to control the basic stage movements.
•
Electron Beam Current Measurement
•
Ion Beam Current Measurement
•
External Scan Interface
•
EasyLift
micro manipulator for the TEM sample preparation
•
Quick Loader
•
Nav-Cam
•
Charge Neutralizer
•
Gas Injection System
– Platinum Deposition, Tungsten Deposition, Insulator Deposition II, Delineation Etch,
Insulator Enhanced Etch, Enhanced Etch, Carbon Deposition, Selective Carbon Mill, Gold
•
Uninterruptible Power Supply
•
Mains Matching
and Isolation Transformer –
provides a galvanic isolated AC-regulated power source with the 115 /
230 V, 50 / 60 Hz output.
•
Compressor
120 V / 230 V, 50 / 60 Hz 4-litre Tank
•
Thermo Neslab Water Cooler
50 Hz / 60 Hz
•
Acoustic Enclosure
for Pre-vacuum Pump
•
Specimen Holder Kit
•
Set of 20 Specimen Stubs for SEM’s
•
UMB Stub Holder Kit
•
UMB FIB/TEM Specimen Kit
•
Dual TEM Grid Holder
•
CryoCleanerEC
+ spare vessel – anti-contamination device
•
Plasma Cleaner
•
Annular STEM
detector – allows detection of electrons transmitted through the sample. Regular voltage range is
from 30 kV down to around 5 kV, which is of course dependent on the sample thickness.
•
Universal Lift-out Holder
for STEM observation
•
Trinity detector (T3)
– In Column detector specially suitable for the Beam Deceleration mode
•
Directional Backscattered Detector (DBS) – Concentric Backscattered Detector (CBS)
•
ICE
detector
•
Thermal Printer Kit
•
Beam Deceleration
mode – is used to observe samples, when electron energy is very low and under very low
accelerating voltages.
•
Remote Control / Imaging
•
SIS Scandium Image
software
•
SIS Scandium
desktop license
•
Scandium Solution Height
software – enables to create a topographic map of a sample
•
SIS webRacer –
allows regular users with ID / passwords (provided by the supervisor) to view and retrieve
worldwide database data, using any internet browser and any OS system (PC, Apple, Sun…).
Содержание Scios 2
Страница 1: ...User Operation Manual Edition 1 Mar 2017 ...
Страница 84: ...Software Control Entering Commands in Summary C O N F I D E N T I A L FEI Limited Rights Data 3 58 ...
Страница 97: ...Alignments E Column Supervisor Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 13 Focus Centering ...
Страница 102: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 18 I Column Alignments ...
Страница 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Страница 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Страница 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Страница 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...