FEI Scios 2, Руководство пользователя

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System Options : EasyLift
C O N F I D E N T I A L – FEI Limited Rights Data 7-20
Welding to the Membrane
In this procedure, the EasyLift needle tip is placed in contact with the membrane and is welded to it with carbon or
tungsten.
Before following this procedure, verify the EasyLift is correctly calibrated. Before inserting the EasyLift (step 3),
read instructions about EasyLift control above.
1. Switch to the 100 pA beam current.
2. Adjust the stage tilt to 0°.
3. Lower the stage by 2 mm below the eucentric position and insert the EasyLift needle. Move the needle tip to the
centre of both electron and ion imaging display using the
EasyLift module control or the EasyLift display control.
This movement will position the needle at the eucentric position (the beams coincident point). Insert the
Carbon or Tungsten GIS needle.
4. Raise the stage slowly until the membrane is directly under the
EasyLift needle tip. Use electron and ion beam views to
monitor its position.
Note

On some samples, the system may activate a touch alarm. If you
see such an alarm, simply acknowledge it and continue working.
5. Gradually bring the rough milled TEM specimen in contact
with the EasyLift needle tip by moving the stage.
6. Place a rectangle deposition pattern to cover the tip end and
the top of the sample (usually the pattern should be
approximately 2 × 1.5 × 1
µm
). Use a proper beam current for
deposition.
C a u t i o n !

Do not retract the metal GIS when the deposition is finished.
Note

You can use a smaller box size if the needle is new or sharply tapered.
If you use a smaller box size, adjust the ion beam current accordingly.