System Options
:
CryoCleanerEC
C O N F I D E N T I A L – FEI Limited Rights Data
7-40
CryoCleanerEC
This equipment allow to decrease the contamination level in the
system. The CryoCleanerEC can be efficient to approximately 24
hours (CryoCleaner – older version – has silver plated Dewar
vessel and can be efficient about 10 hours).
W A R N I N G !
This option uses liquid Nitrogen (LN2), which may cause serious cold
burns.
Parts and Accessories
The CryoCleanerEC consists of a Nitrogen vessel that is
surrounded by an outer container – the Vacuum vessel, which is
connected to one of the specimen chamber ports by a vacuum
seal. The space between is then pumped by the microscope
vacuum system.
When the specimen chamber (together with the CryoCleaner) is
pumped, liquid Nitrogen is introduced to the Nitrogen vessel. Its
outside cold surface adsorbs contaminating products from the specimen chamber. The vacuum in the specimen
chamber improves over a short period and contamination is now reduced.
The Vacuum vessel has special flange enabling to mount it to different chamber ports with the use of interlink with
a desired shape (depending on the port to be used and the vicinity).
The interlink flanges can be mounted on by means of the 3 screw-hole fittings on the perimeter of the vacuum
flange. Care must be taken that the 'O' ring held in the end of the flange is secure, free of dirt and is not crimped
when mounting.
FIGURE 7-13
Vacuum Vessel and Nitrogen Vessel with accessories
/
Flanges
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