FEI Scios 2, Руководство пользователя

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System Control : Equipment
C O N F I D E N T I A L – FEI Limited Rights Data 2-16
Stage movement limits
The motorised movements of the stage can be operated under software control for more advanced location
mapping. This includes
Shift , Get , Track and the Stage module functionality. A live imaging can be repositioned
either by the stage movement or by the Beam Shift .
Note

When moving the stage or tilting the specimen, the magnification may need to be reduced not to lose the feature of interest
off the screen.
FIGURE 2-8
Stage Movement Schema
C a u t i o n !

The positive Z value direction depends on the Link Z to FWD status (see Chapter 5).
C a u t i o n !

If the maximum sample size is near to the limit, stage tilt can be limited. Beware of hitting the objective pole piece!
Table 2-3
Stage Features and Limits
Item 110 × 110 mm Note
X -55 to +55 mm
Y -55 to +55 mm
Z 66 mm
R 360° continuous
T -15° to +90° maximally
Eucentric distance 7 mm / 19 mm Electron / Ion beam
Maximum sample weight No restriction: 500 g including stub holder
No Tilt: 2 000 g
X and Y movements only: 5 000 g