FEI Scios 2, Руководство пользователя

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Maintenance: Aperture Strip Module
C O N F I D E N T I A L – FEI Limited Rights Data 6-3
Aperture Strip Module
The electron objective apertures are holed on a Molybdenum strip which is mounted on a metal holder. The strip
has 14 aperture positions and 1 mm alignment hole in the frame. The strip comes aligned in a metal module which
is connected to the end of the Aperture rod by a screw. The module is considered as a consumable and therefore
would be normally replaced when heavily contaminated. In some cases it is possible plasma cleaning with any
available plasma cleaner (in this case follow the equipment instructions). There is also a heater in the rod to assist
cleaning / anti-contamination. All screws are made of Titanium not to have any magnetic effect.
FIGURE 6-1
Aperture Strip Module (Holder Attachment Screw highlighted)
Removing Aperture Rod
1. With the high voltage off, vent the specimen chamber to the atmospheric pressure (the Aperture rod is in the same
vacuum space as the specimen chamber).
2. If connected remove the heater cable from the outer end of the rod. Loosen 2 screws (2.5 allen key) and
disconnect heater.
3. Unscrew (rotate counterclockwise) the end of the Aperture rod and carefully remove it from the microscope.
FIGURE 6-2
Heater cable, 2 allen screws
Note

Preparation should be made to be immediately available to clean or replace apertures as the specimen chamber has to stay
at atmospheric pressure for the duration of maintenance.
Replacing Aperture Module
The new Aperture Module comes in a fluoroware container and is ready to be used.
1. Unscrew the Titanium screw holding the old module onto the rod. Keep the screw in the hole of the rod and let
the module fall away.
2. Open the new module pack and let the new module sit with the connection end uppermost to the edge of the
container base.
3. Pick up the new module with the Titanium screw end and fasten, making sure of a good fit.