System Control
:
Interface Elements
C O N F I D E N T I A L – FEI Limited Rights Data
2-4
Mains Switchboard
Breakers and connectors placed at the cabinet back:
•
Mains switch S1
– entire system mains power switch
•
PVP Breaker F1/5A
– pre-vacuum pumps power switches
•
Mains Breaker F2/10A
– system pumps power switches
•
Main input 230 VAC
– input mains power cord
•
PVP X5
– output power supply for pre-vacuum pumps
•
X1
– not used
•
X2
– optional equipment output power supply
•
X3
– optional equipment output power supply
•
X4
– output power supply for Microscope PC, LCD 1, optionally for Support PC,LCD 2, LCD 3
FIGURE 2-4
Mains Switch Board
C a u t i o n !
Always keep all control elements accessible! This is especially important in case of emergency.
Содержание Scios 2
Страница 1: ...User Operation Manual Edition 1 Mar 2017 ...
Страница 84: ...Software Control Entering Commands in Summary C O N F I D E N T I A L FEI Limited Rights Data 3 58 ...
Страница 97: ...Alignments E Column Supervisor Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 13 Focus Centering ...
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Страница 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Страница 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Страница 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...