Page 4-18
Mask Data
3. Plate-making reference
Choose the mask plate-making reference according to each condition.
Transport
direction
Sample board
pattern position
In the case of (650X550) mask
Rear Center
(550X650) mask
X-direction center distribution
Position of 200mm from the inner
side of Y-direction mask frame
Longitudinal
frame
standard
Latitudinal
frame
standard
Center
Right Rear
(550X650) mask
Position of 110mm from the right
edge side of X-direction mask frame
Position of 200mm from the inner
side of Y-direction mask frame
250mm
330mm
550mm
160mm
250mm
200mm
(150mm)
650mm
250mm
330mm
550mm
CL
250mm
650mm
160mm
CL
Sample board
pattern position
Transport
direction
(650X550) mask
X-direction center distribution
Position of 150mm from the inner
side of Y-direction mask frame
(550X650) mask
X-direction center distribution
Y-direction center distribution
(650X550) mask
X-direction center distribution
Y-direction center distribution
(650X550) mask
Position of 160mm from the right
edge side of X-direction mask frame
Position of 150mm from the inner
side of Y-direction mask frame
250mm
330mm
550mm
160mm
250mm
200mm
(150mm)
650mm
110mm
(160mm)
Transport
direction
Sample board
pattern position
193C-E-EMA04-A02-00
Summary of Contents for KXF-193C
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