Page 4-19
DA
T
A
MODIFICA
TION
4
Mask Data
Left Rear
(550X650) mask
Position of 110mm from the left edge
side of X-direction mask frame
Position of 200mm from the inner
side of Y-direction mask frame
(650X550) mask
Position of 160mm from the left edge
side of X-direction mask frame
Position of 150mm from the inner
side of Y-direction mask frame
Right Center
(550X650) mask
Position of 110mm from the right
edge side of X-direction mask frame
Y-direction center distribution
(650X550) mask
Position of 160mm from the right
edge side of X-direction mask frame
Y-direction center distribution
Left Center
(550X650) mask
Position of 110mm from the left edge
side of X-direction mask frame
Y-direction center distribution
(650X550) mask
Position of 110mm from the left edge
side of X-direction mask frame
Y-direction center distribution
330mm
550mm
250mm
650mm
160mm
CL
250mm
110mm
(160mm)
Sample board
pattern position
Transport
direction
250mm
330mm
550mm
250mm
650mm
160mm
CL
(160mm)
110mm
Transport
direction
Sample board
pattern position
250mm
330mm
550mm
160mm
250mm
200mm
(150mm)
650mm
110mm
(160mm)
Transport
direction
Sample board
pattern position
193C-E-EMA04-A02-00
Summary of Contents for KXF-193C
Page 2: ......
Page 10: ...Page 10 193C E EMA00 A02 01 INDEX AppendixA RECOGNITION DEVICE ...
Page 32: ...Page 32 193C E EMA00 A04 01 MEMO ...
Page 46: ...Page 1 14 193C E EMA01 A01 01 MEMO ...
Page 80: ...Page 3 26 193C E EMA03 A02 01 MEMO ...
Page 128: ...Page 4 48 193C E EMA04 A03 01 MEMO ...
Page 158: ...Page 5 30 193C E EMA05 A01 01 MEMO ...
Page 176: ...Page 6 18 193C E EMA06 A01 01 MEMO ...
Page 192: ...Page 7 16 193C E EMA07 A01 01 MEMO ...
Page 202: ...Page 8 10 193C E EMA08 A01 01 MEMO ...
Page 206: ...Page 4 193C E EMA0Z A01 01 MEMO ...