Operating Manual Leica EM ACE600
Version 01/19
Page 61
Define the density of the new material and the pre-sputter time and current under
Method.
4.8
E-beam coating
E-beam coating is the type of coating which gives the finest grains. Additionally,
the coating is directional. Different materials (carbon and metals) can be
evaporated. Typically, carbon or carbon/platinum layers are produced by e-beam
evaporation. Those will be described in this chapter.
The carbon rod has a diameter of 3 mm. The carbon rod with a drilled recess
holds a platinum inlet of 2 mm. The platinum inlet is either glued into the recess
with conductive carbon cement or slightly deformed so it does not fall out of the
rod. To melt the inlet in, the rod is mounted in the same way as for evaporation
(see protocol below) and heated up with the degassing process.
For low angle rotary shadowing applications two extra stages, including a
holder to mount the quartz on the side of the stage, are available. One
standard and one to clamp grids.
When using a LARS or grid stage for low angle rotary shadowing with the quartz
mounted on a holder on the side of the stage, do not forget to change the settings
from quartz on stage to quartz on side as described in 4.1.
